The measuring systems series MFE (metrology front end) is particularly suited to manufacturers of structured wafers, masks, MEMS and similar products. Because of the very high cleanliness, process and yield requirements, all tools are especially designed for use in cleanrooms.
MFE systems measure critical dimensions and overlays on the one hand and 3D topography or film thickness on the other. All tools are metrological and comply with the necessary industry standards such as the SECS II / GEM software interface. Furthermore, the system is fully automated and equipped with wafer cassettes and part carriers.
An EFEM and mini-environment for class 1 cleanrooms rounds off the upper segment of the MFE tool series.
