The new white light interferometer FRT WLI generates 3D laminar imagery at sub-nanometer height resolution. The sensor is perfectly suited for characterizing entire surface sections of hard to measure reflective, rough or liquid specimen within just a few seconds.

As with the WLI sensor, the AFM can also be used in combination with the systems’ chromatic sensor. In such a scenario the user at first uses the chromatic sensor to generate a rough overview scan. Then, it is possible to further investigate the surface structure at nanometer resolution by automatically moving the AFM to a position within the previously performed scan. The opposite way around, it is possible to automatically move every highly resolved AFM measurement position into the measuring range of the optical topography sensor in order to inspect larger profiles and surface areas. This way, the instrument combines area scans of up to 600 mm as well as sub-nanometer resolution in one single system. The AFM may also be equipped with AFAM in order to gain information about elastic properties and E-modulus at maximum resolution by injecting ultrasonic waves into the sample and analyzing the interaction with the cantilever.