Fries Research & Technology GmbH (FRT) developed the first multi-sensor metrology system ten years ago, which at that time set the standard in terms of usability and scalability. Up to this day, FRT has continuously presented innovative and unique solutions based on this invention. The use of optical sensor technology in combination with atomic force microscopy is the latest addition to the FRT family of products. Here, the measuring bandwidth varies from the nanometer to the meter and reliable results are quickly presented in 2D, 3D or data mode for exchange with third-party systems. Besides the wide measuring bandwidth, multi-sensor systems moreover offer a multitude of information about a sample’s surface. Some examples are: roughness, contour, topography, step height, geometry, thickness, film thickness or even hard-to-measure parameters like abrasion, elasticity, and magnetism.

Application Examples: Semiconductor and Automotive Industry A particularly strong demand for multi-sensor systems can be observed in the semiconductor and automotive sector. In automotive, these versatile systems are used to design and produce motors or to optimize the haptical and optical properties of high-tech plastics of a car’s interior. Another typical application example is the design of functional soil-resistant surfaces. In the field of semiconductors, automated multi-sensor systems measure a wafer’s bow and warp as well as step heights and total thickness variation up to a diameter of 300 mm. Results are then passed to third-party systems through the SECS/GEM industry standard protocol.

Multi-Sensor Technology is a Future-Safe Investment Accelerated progress in the field of nano- and microtechnology generates products with fascinating new properties and breath-taking performance gains. Especially here it is important, to quickly respond to shifting market trends, shorter product innovation cycles, and increasing pressure of the competition. Multi-sensor measuring systems can help your R&D and production to be one step ahead, because they offer more extendibility than conventional tools. In combination with FRT’s comprehensive portfolio of sensors, an investment into multi-sensor technology is future-safe. Let it be just one sensor or an entire multi-sensor configuration – you determine time and extent of your investment.