FRT has recently introduced a new line of integrated metrology tools. The MFE Series tools (Metrology for Frontend) are setup in an ISO compliant class 1 mini-environment and may be equipped with a choice of FRT’s optical sensors plus the optional AFM. This way, it is possible to efficiently run a multitude of different measurements in one single system. All tools come with a software package that offers automated pattern recognition and powerful analysis features. After inserting the wafer cassettes, an automated robot for 200 mm or 300 mm wafers takes, prealignes and places, wafer by wafer on the measuring stage. Then, pattern recognition, system calibration, and measurement take place. Afterwards, all results are passed through the SEMI compliant SECS/GEM interface to the next step in the frontend process. Due to their high level of automation, all MFE tools ensure short processing time and very high repeatability.

Depending on the selected sensors (all systems are multi-sensor capable), the tools will measure bow, warp, TTV, roughness, film thickness or other customer specific measurement tasks. The software package allows for characterization and analyses of the entire wafer or just sections in 2D and 3D. For semiconductor and MEMS manufacturers, these new systems offer precise and yet cost-effective quality control and optimization of production processes.

See it for yourself! Visit us on the Internet for additional information and watch the MFE product movie: http://www.frt-gmbh.com/en (Pagecode: 47)