| Metrology for Frontend (view product movie) |
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The measuring systems series MFE (metrology front end) is particularly suited to manufacturers of structured wafers, masks, MEMS and similar products. Because of the very high cleanliness, process and yield requirements, all tools are especially designed for use in cleanrooms. Details |
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| MicroProf® Vision |
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The MicroProf® Vision combines the well-known accuracy and reproducibility of the MicroProf® series with the ability to fully automate surface inspection in production environments. By utilizing a high resolution, telecentric, illuminated CCD-camera
and a pattern recognition software, the MicroProf® Vision automatically detects different parts and measurements sites and thus saves you valuable time for routine, repetitive measurements. Details |
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| Custom Solutions |
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In addition to the standard measuring systems, FRT designs and manufactures highly specialized solutions for applications in demanding production environments. Over many years, FRT has developed the competence to engineer and integrate metrological systems into third-party tools and to design entire process monitoring systems by carefully selecting only the best hardware and writing custom software. Details |
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