| Metrology for Frontend (view product movie) |
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The measuring systems series MFE (metrology front end) is particularly suited to manufacturers of structured wafers, masks, MEMS and similar products. Because of the very high cleanliness, process and yield requirements, all tools are especially designed for use in cleanrooms.
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| MicroGlider® |
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The MicroGlider® measures profile, topography, roughness, and coating thickness with further enhanced accuracy. The MicroGlider® is also equipped with a CCD camera for easy sample positioning and can automatically perform pre-defined measurements.
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| MicroGlider® Asphere |
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The MicroGlider® Asphere employs a unique method to perform highly precise profile measurements on spherical and aspherical lenses. The lens is fixed by a holder, which is mounted on an air bearing rotary table. The system configuration is such that the sensor is always perpendicular to the lens surface, which is rotated during measurement.
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| MicroProf® |
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The MicroProf® is a very versatile and modular measuring tool that is suited for a wide range of applications. No matter what you are planning to measure, whether it is profile, roughness, topography or film thickness, this system is a true all-rounder. Most importantly, it is very easy to use, expandable, can be automated and provides instant visible results from a time - and cost efficient operation.
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| MicroProf® TTV |
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The MicroProf® TTV quickly measures both sides of a part simultaneously or total thickness variation (TTV) as well as the roughness, contour and topography on both surfaces. Exchangeable part holders can be used to measure different samples such as wafers, dies, optics, foils, sheet metal, etc. Equipped with pattern recognition software, the MicroProf® TTV can be fully automated with measuring sequences and part handling.
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| MicroProf® Vision |
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The MicroProf® Vision combines the well-known accuracy and reproducibility of the MicroProf® series with the ability to fully automate surface inspection in production environments. By utilizing a high resolution, telecentric, illuminated CCD-camera
and a pattern recognition software, the MicroProf® Vision automatically detects different parts and measurements sites and thus saves you valuable time for routine, repetitive measurements.
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