MicroProf® - The Multitalent for all Applications
The MicroProf® is a very versatile and modular measuring tool that
is suited for a wide range of applications. No matter what you are
planning to measure, whether it is profile, roughness, topography
or film thickness, this system is a true all-rounder. Most importantly,
it is very easy to use, expandable, can be automated and
provides instant visible results for a time - and
cost efficient operation.

 




measurement of metal surface
profile of an embossed structurestructures on a semiconductor part
measurement of metal surfaceprofile of an embossed structure structures on a semiconductor part


Features

  • non-destructive measurement
  • excellent resolution
  • outstanding repeatability and reproducibility
  • automated measuring cycles
  • sample positioning with CCD camera
  • versatility through modular conception
  • multi-sensor capability
Hardware

  • chromatic white light or AFM sensor
  • compact x,y stage for perfect orthogonality
  • high precision mechanical axes
  • high resolution linear glass scales
  • backlash-free, re-circulating ball spindles
  • rugged and stable granite mount
  • industrial computer, monitor, electronics, and manual
Software

  •  FRT Acquire Measuring Software
  • macro collection for typical measuring applications
  • automation of complex measurements
  • intuitive user interface design

  • FRT Mark III Analysis Software
  • complete analysis of the generated data (2D and 3D)
  • logging of analysing steps and results
  • customizable reports
  • various data import and export formats
  • English and German language sets
  • free updates