MicroSpy® Profile - Budget-friendly Optical Profilometer
The MicroSpy® Profile is a budget-friendly single-sensor optical profilometer for non-contact 2D und 3D surface measurements.

The tool is used in R&D as well as industrial production control across many industries from medical technology, automotive, semiconductors, PV, MEMS, optics and more.
 




Backside metallization of a solar cell, left: 3D topography, right: 2D profile of metallization
left: Roughness evaluation according to DIN ISO, right: 3D topography of a MEMS structure
Backside metallization of a solar cell
Left: 3D topography, right: 2D profile of metallization
Left: Roughness evaluation according to DIN ISO
Right: 3D topography of a MEMS structure


Notably versatile

  • For surfaces from smooth to very rough,
    absorbing to reflective or transparent
  • Powerful and long-lasting LED light source
  • Resolution down to the nanometer
  • Low maintenance as there are no moving parts in the sensor
  • Sensors with different measuring ranges available

Notably cost-effective

The FRT MicroSpy® Profile is designed to be
cost-effective and powerful at the same time.

  • Attractive purchase price
  • Low follow-up costs for training, service and spare parts
  • Small footprint

Notably user-friendly

  • Integrated CCD-camera
  • Live camera picture of measuring area in acquisition software
  • Selection of measuring area with mouse
  • Easy to use evaluation software FRT Mark III
  • Various functions for visualization, analysis and reporting

Notably powerful

  • Fast, non-contact measurement
  • Motorized x,y-measuring area 50 mm x 50 mm
  • Manual sensor approach through precise z-axis
  • Depending on selected sensor, height measuring ranges
    from 300 μm to 3 mm und a maximal vertical resolution
    of 3 nm are available