MicroSpy® Topo - Confocal Microscope

Application Versatility 

  • Measurement of rough, reflective and transparent surfaces
  • High angular acceptance
  • Stitching mode for measuring field enlargement

The confocal measuring principle which comes to use in this system is an established, contact-free approach for the analysis of roughness, contour and topography in a multitude of lab and production control scenarios.


Fast and Intuitive Operation  

  • Acquisition of high-resolution measuring data in five easy steps
  • Typical measuring times of only a few seconds

Beside superior precision, also high measuring speed and intuitive operation are important objectives for the development of FRT measuring tools. This way the user is able to quickly conduct productive analyses and reports.


Highly Productive Hard and Software

  • Outstanding height resolution in the nanometer range
  • Excellent depth-of-focus, sharp imagery at any focal position
  • Long-lasting and low-maintenance LED light source
  • Complete software package for data acquisition, analysis
    and reporting

The scope of delivery consists of the measuring system with a motorized x,y stage for sample positioning, a high-performance PC with TFT display and an operation manual.

Remarkable in this class of confocal microscopes is the use of high-quality granite for the entire system. This way we ensure, just like with all FRT products, a maximum of structural and thermal stability.


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MicroSpy Topo / Confocal Microscope

The FRT MicroSpy® Topo is the cost-efficient confocal microscope for fast and contact-free surface analyses. Ask for a quote now.

MicroSpy Topo - Confocal Microscope
The MicroSpy® Topo stands out due to its high angular acceptance and its ability
to perform on rough, reflective and transparent specimen.

 

Back side metallization of a solar wafer (L), Groove in wafer polishing disc (R)
Back side metallization of a solar wafer (L), Groove in wafer polishing disc (R)

Precision linear measuring scale made of glass (L), Groove calibration standard (R)
Precision linear measuring scale made of glass (L), Groove calibration standard (R)


 
Measuring System 
System Designbase and sensor-mount made of high-quality granite
Sample Positioninghigh-precision stage with joystick control, travel range 100 x 100 x 30 mm (x,y,z)
Footprint570 x 400 x 730 mm (h,w,d)
Total Weight125 kg (screw-on transport handles included)
Power Supply100-240V, 50-60 Hz, 25 VA
 
Lenses 1 10X 20X 50X100X
Measuring Range (µm) 400400400400
Working Distance (mm)1111
Resolution z (nm)0,01321
Resolution x, y (μm)1.9810.396/0.422 0.198/0.372
Measuring Field (μm)1520 x 1140
760 x 560
304 x 228
152 x 114
Numerical Aperture0.50.750.,80.9
 
Software Package 
Data Acquisitionfast measurements in just 5 steps, typical measuring time < 1 minute, stitching mode
Data Analysis (FRT Mark III) 3 analysis of profile, topography, roughness, step height as
well as many 2D and 3D filter- und evaluation routines
Reportingcustomizable reports, customizable input fields for adding additional information to reports from user input
LanguagesGerman / English (switchable)

 1
Scope of delivery includes 1 lens of choice

 2 Geometric / optical (Rayleigh Criterion)
 3 Exportformats: ASCII, Autocad DXF, CSV, BMP, JPG, PNG, TIF