Autofokus Sensor AFL - Autofocus Measurement

The FRT AFL operates on the principle of dynamic focusing. Here the sensor lens is brought up to the target until the measuring spot is focused on the surface. When a surface is scanned, the lens is moved as the measuring spot follows the object height. The change in lens position, which can be measured to high accuracy, is used to determine the surface height.

The sensor is equipped with an integrated microscope, which simplifies the selection of the target position and allows it to be observed during the measurement. 

Together with the FRT MicroProf® and MicroGlider®  instruments the sensor is used to measure roughness, contour and topography. Any kind of profile or 3D surface measurements can be performed.


Autofocus Sensor AFL
Measuring Principle
 
  • non-destructive, non-contact measurement
  • high resolution and precision
  • small measuring spot, high lateral resolution
  • coaxial measurement, no shading effects
  • high sampling rate
  • integrated microscope for convenient
    selection of measurement position


         Download Options
Typical Applications
 
  • quality assurance in automotive industry (interior, cylinders, shafts, electronics etc.)
  • profile measurements of lens contours
  • profile and 3D measurements roughness determination on technical surfaces (tools, cylinders, finished products etc.)
  • dimension measurement of (micro-)injection molding parts
  • measurement of wafer flatness
  • R&D and Q&A in MEMS
  • R&D and Q&A in medical technology (catheters, prostheses etc.)

Technical Specifications
   
  measuring range z 1.5 mm
 working distance
2 mm
 resolution z
10 nm
 resolution x,y
1 µm
 measuring angle 1
approx. 90° ± 25°
 interface
RS232
 light source 2
class 1 semiconductor laser, 780 nm

1 Larger measuring angles on scattering surfaces possible. 

Technical specifications and content are subject to change.