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 | | The FRT AFM is a sensor for atomic force microscopy. Measuring results on nanometer-scaled structure sizes are obtained with extremely high lateral and vertical resolution in the sub-nm range. The FRT AFM can be operated in contact or non-contact mode. In combination with a MicroProf® Multisensor measuring tool that is equipped with an additional optical point sensor, a continuous measuring range from a few μm up to 600 mm can be achieved. | | 
- Extremely high local resolution
- Non-destructive measurement in non-contact mode
- Automatic approach to surface
- Sampling of surface areas by means of a piezo drive
- Adjustment-free tip exchange
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AFM measurement of
biological specimen | 
oxide film on wafer | 
blood cells measured with AFM |
 - 3D topography measurement
- Roughness measurement
- Quality assurance in micro technology
- Roughness measurement in the nm and sub-nm range, e.g. on wafers or optical components
- Surface characterization of biological samples
- Measurement of nanostructures surface investigation of medical samples,
e.g. protheses, catheters or stents - Inspection of elastical, electrical, and magnetic properties in material science
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| Measuring Range x,y | 20 µm x 20 µm | 40 µm x 40 µm | 80 µm x 80 µm | | Measuring range z | 3 µm | 4 µm | 6 µm | | Resolution x,y | 1 nm | | Resolution z | 0.1 nm | | Scan speed | typically 1 – 5 lines / s | | Detection principle | interferometer | | Measuring tips | silicon, various types | | Tipchange | adjustment-free | | Input channels | max. 8 simultaneous | | Image size | freely selectable (including rectangles), 128 – 1024 pixel |
| | Scope of Delivery | | AFM measuring head, measuring tips, motorized z-axis, sensor electronics, software, operating manual | FRT reserves the right to change technical specifications. |
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