FRT AFM - Atomic Force Microscopy
Atomic Force Microscopes (AFMs) scan the surface of a sample using a very fine tip on the end of a microscale cantilever.

Atomic interactions between the tip and the surface lead to a deflection of the cantilever which is then detected by a piezoresistive element. Based on this effect, the AFM can measure the topography or roughness of a surface with very high resolution non destructively. The AFM can be used in different operating modes and thus allows for the investigation of further properties, such as electrical and magnetical forces or elasticity of a specimen.


Sensor: AFM
Measuring Principle
 
  • topography measurement at very high resolution
  • automatic approach of the tip to the surface
  • sampling of surface areas by means of a piezoresistive elementcontact/non-contact mode
  • measurement of electrical and magnetic properties
  • measurement of lateral forces and elasticity1
  • measurement in liquids2
  • further operating modes upon request

    1 contact mode in basic version, additional modes upon request  
    2
    optional



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AFM Messung an einer biologischen Probe
AFM measurement of
biological specimen
Oxidschicht auf einem Wafer
oxide film on wafer
Messung von Blutzellen
blood cells measured with AFM


Typical Applications
 
  • quality assurance in micro technology
  • roughness measurement in the nm and sub-nm range, e.g. on wafers or optical components
  • surface characterization of biological samples
  • measurement of nanostructures surface investigation of medical samples,
    e.g. protheses, catheters or stents
  • inspection of elastical, electrical, and magnetic properties in material science.

Technical Specifications
   
measuring range x,y
20 μm x 20 μm 
40 μm x 40 μm
80 μm x 80 μm
 measuring range z
2 µm
4 µm
6 µm
 measuring principle
atomic force microscopy
 detection principle
fiber-optic-interferometer
 resolution z
typ. 2 nm
 resolution x,y
typ. 5 nm
 scan speed 1-5 lines/s

Technical specifications and content are subject to change.