The light of a high-performance LED is focused by a movable objective on an object‘s surface, then reflected and finally captured by a detector. If the object is out of focus, its illumination and image on the detector are unsharp, which results in a very low output signal. Once the object‘s surface is in the focus of the objective and the detector, a maximum signal is received. Very precise information on the height can be obtained by gradually moving the focal point (lens) in z-direction. This punctiform principle can be extended into a field of view method by the use of a rotating Nipkow disc which distributes the incident light beam line by line over the object‘s surface to measure 3D topography, profiles, and roughness.
	Non-contact measurement Fast 3D measurement of topography, structure and roughness Excellent height resolution and depth of field Exchangeable objectives for different fields of view available	Download Options   Product Sheet   Company Brochure
scratch in laquer     measurement of roughness normal
	Semiconductor Industry MEMS Optics Automotive Industry Plastics and Paper
	lens 10X 20X 50X 100X working distance 1 mm resolution z  0.01 µm  3 nm  2 nm  1 nm resolution x,y   1.98 µm  1 µm  1.396 µm/0.42 µm 1  0.198 µm/0.37 µm 1 field of view  1520 x 1140 µm  760 x 560 µm  304 x 228 µm  152 x 114 µm 1 geometrical/optical (Rayleigh Criterion) Technical specifications and content are subject to change.