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A punctiform laser beam gets focused by an oscillating lens on the surface of the object. The reflected light get focused on a pinhole and enters a detector. Only if the object‘s surface is in the focal position, the detector receives a significant signal. The information on the corresponding height at the measuring point is obtained from the z-position of the oscillating lens. | |  | | | - non-contact measurement
- high-resolution measurement
- precise results even with changes in the surface
reflectance at different measurement positions - fast measurements even on surfaces with very low reflectance
| |  | | | - fast topography and profile measurement even on
sensitive and soft materials - measurement of microstructures
- measurement of ground and polished optical components
- control of electronic componentsinspection of tools and
products in the field of plastic injection moulding - inspection of dimensions, step-height etc. on printed circuit boards
|  | | | | measuring range z | 1000 µm | | measuring distance | 4 mm | | measuring rate | max. 1000 Hz | | resolution z | 20 nm | | resolution x,y | 1 µm | | measuring angle 1 | approx. 90°± 25° | | light source 2 | class 2 semiconductor laser, 660 nm | 1 Diffusive surfaces allow for wider measuring angles. 2 In accordance with DIN EN 31252 Technical specifications and content are subject to change. |
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