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The measurement is based on conoscopic holography. A laser beam is focused on the specimen. The light that is scattered in the measuring spot is captured by the sensor.
A configuration of two polarizers and one uni-axial crystal splits the captured light into two light beams that pass the crystal at different speeds.
This leads to a superposition on the detector. The distance between lens and specimen is evaluated from the resulting double slit interference pattern.
|  |  | | | - non-destructive, non-contact measurement
- wide working range and measuring bandwidth
- very well suited for steep edges
- coaxial measurement, no shading effects
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 measurement of tire |  measurement of cam shaft
| |  | | | - quality assurance in automotive industry
(interior, cylinders, shafts, electronics etc.) - profile measurements of lens contours
- profile and 3D measurements roughness
determination on technical surfaces (tools, cylinders, finished products etc.) - dimension measurement of MEMS
- measurement of wafer flatness
- R&D and Q&A in MEMS
- R&D and Q&A in medical technology
(catheters, prostheses etc.) |  | | | | focal length of lens | 25 mm | 50 mm | 75 mm | 100 mm | | light source | class 1 laser diode | | measuring range | 1.8 mm | 8 mm | 18 mm | 35 mm | | working distance | 15 mm | 42 mm | 65 mm | 90 mm | | resolution z | < 0.4 µm | < 1 µm | < 2 µm | < 4 µm | | resolution x 1 | 12 µm | 15 µm | 25 µm | 35 µm | measuring angle to surface | approx. 90° ± 70° | 1 Due to its elliptical measuring spot, the x-resolution is better than the y-resolution. Technical specifications and content are subject to change. |
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