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FRT CWL FT - Interferometric Film Thickness Sensor

The FRT CWL FT is an interferometric film thickness sensor that was developed for the thickness measurement of products such as foils or films which are transparent for visible light. Measurements can be conducted as single point and profile measurements or film thickness mappings of larger areas. Also, the sensor can be used to characterize multilayer film systems.

 FRT CWL FT - Interferometric Film Thickness Sensor 
Measuring Principle
   
  • Optical, non-contact, non-destructive measurement
  • High local and thickness resolution
  • Excellent signal/noise ratio
  • Small, robust, wear-free measuring head
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Typical Applications
 
  • Punctual thickness measurement
  • 2D profile measurement
  • 3D film thickness mapping
  • Thickness measurement of single films and multilayer systems
  • measurement of foils in the food industry
  • control of blister packaging
  • thickness mapping on semiconducturs
  • varnish measurement for the automotive industry
  • examination of multilayer systems such as air gaps
    below transparent covers

Technical Specifications
 
Measuring spot size CWL FT 10 µm CWL FT 40 µm
Measuring range film thickness 1) CWL: 3 – 180 µm / CWL F: 2 – 250 µm / CWL X: 2 – 250 µm
Working distance 9.5 mm 27 mm
Resolution film thickness 1) 10 nm 10 nm
Resolution x.y 5 µm 20 µm
Numerical Aperture 0.17 0.09
Measuring angle 90° ± 10° 90° ± 5°
1) At refractive index of n=1
Sensor electronics CWL CWL F CWL X
Measuring rate 2.000 measurements / sec.
(2 kHz)		 4.000 measurements / sec.
(4 kHz)		 14.000 measurements / sec.
(14 kHz)
Light source LED Halogen lamp Xenon high-pressure lamp
Repeatability < 0,00009 x measuring range
Calibration tables 16
Operating temperature + 5° C to + 50° C
Dimensions (W x H x D) 200 mm x 100 mm x 93 mm 260 mm x 115 mm x 310 mm 360 mm x 160 mm x 400 mm
Scope of Delivery
Measuring head, optical fiber, sensor electronics, operating manual