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The FRT CWL HR, just like the other sensors of the CWL family, uses the principle of chromatic distance measurement. Depending on the wavelength, the light is focused in different distances in front of the measuring head. The light that is reflected from the object is captured and evaluated with regard to its wavelength. As the illustration shows, a characteristic peak can be observed in the spectrum, which allows to determine the height at the current measurement position. Due to its modified optical setup and its super-luminescent diode, the CWL HR provides the highest lateral resolution in the CWL family. It works on highly reflective as well as light absorbing and rough surfaces. It may even be used to measure the thicknesses of thin transparent films. | |  | | | - non-destructive, non-contact measurement
- sub-µm lateral resolution (x, y)
- high numerical aperture (measurement of steep edges)
- coaxial measurement, no shading effects
| |  | | | - fast measurement of profile and topography even on very sensitive surfaces
- measurement of fine structures in micro- and nanotechnology
- measurement of thin transparent films
- measurement of step heights, distances or angles in the field of electronics and semiconductors
- evaluation of geometries in micro injection molding
- surface characterization in medical technology and life sciences
|  | | | | measuring range z | 100 µm | | working distance | 5.8 mm | | resolution z | 10 nm | | resolution x, y | 0.7 µm | | measuring angle | 90° ± 40° | | measuring rate | max. 4000 Hz | | light source | SLD 830 nm | | interfaces | USB, RS232, analog | Technical specifications and content are subject to change. |
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