Chromatic Infrared Sensor IR - Fries Research & Technology

FRT CWL IR - Infrared Film Thickness Sensor

The FRT CWL IR is an interferometric film thickness sensor with an IR light source. The sensor was developed for the thickness measurement of materials
that are transparent in near infrared light. Measurements can be conducted as single point and profile measurements or film thickness mappings of larger areas. Also, the sensor can be used to characterize multilayer film systems. Typical applications are the characterization of semiconductor and sapphire wafers, glass as well as films. Another application is the measurement of adhesive layers between wafers.

Optical, non-contact,
non-destructive measurement
Measurement with infrared light
High local and thickness resolution
Excellent signal/noise ratio
Small, robust,wear-free measuring head

	Product Sheet
	Company Brochure

Punctual thickness measurement
2D profile measurement
3D film thickness mapping
Thickness measurement of single films and multilayer systems

Model	IR 50	IR 250	IR 500	IR 1000
Measuring range film thickness¹⁾	4 – 200 μm	28 – 1100 μm	34 – 1900 μm	60 – 3500 μm
Working distance	39,7 mm
Resolution film thickness¹⁾	15 nm	75 nm	130 nm	240 nm
Resolution x,y	25 μm	4.5 μm
Numerical aperture	0.09
Measuring angle	90° ± 5°

Measuring rate	4,000 measurements / sec. (4 kHz)
Light source	Halogen lamp	IR superluminescence diode
Repeatability	< 0.0002 x measuring range
Operating temperature	+ 5° C to + 50° C
Dimensions (W x H x D)	260 mm x 115 mm x 310 mm
1) At refractive index of n=1
Scope of Delivery
Measuring head, optical fiber, sensor electronics, operating manual