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 | The FRT CWL is a fast, optical distance measurement sensor that can be precisely configured for the given application. For this, there is a choice of standard and special sensor heads with different measuring ranges available. The non-destructive working principle of the FRT CWL performs equally well on surfaces with high and low reflectivity. Due to its bright light source and a measuring rate of up to 14 kHz, the sensor is used for a variety of applications in industrial production control and R&D. Up to 16 different measuring heads can be calibrated on one sensor electronics and be used exclusively as required.
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- Optical, non-contact, non-destructive measurement
- High measuring rate up to 14 kHz
- Bright, small measuring spot
- High lateral and vertical resolution
- Excellent signal/noise ratio
- Small, robust, wear-free measuring head
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- 2D profile measurement
- 3D topography measurement
- Step height measurement
- Roughness and planarity measurement
- Structure and contour measurement
- quality checks in front-end and back-end fabrication of
semiconductors (e.g. wafer, die, packages) - R&D and quality control in micro systems engineering
(e.g. MEMS, inkjet print heads) - R&D and quality control in medical technology
(e.g. stents, catheters, prothesises) - quality checks in the automotive industry
(e.g. interior, cylinders, shafts) - quality checks of circuit boards, injection moulding (micro-)parts,
optical components (e.g. lenses) - profile and 3D-measurements on heavily structured surfaces
(e.g. tools, rollers, components)
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 | | | | Measuring range z1) | 300 µm | 600 µm | 1 mm | 3 mm | 6 mm | 10 mm | | Working distance | 4.5 mm | 6.5 mm | 20 mm | 22 mm | 35 mm | 70 mm | | Resolution z 2) | 3 nm | 6 nm | 10 nm | 30 nm | 60 nm | 100 nm | | Resolution x.y | 2.5 µm | 2 µm | 1.8 µm | 6 µm | 8 µm | 12 µm | | Numerical Aperture | 0.5 | 0.5 | 0.7 | 0.5 | 0.43 | 0.33 | | Measuring angle 3) | 90° ± 30° | 90° ± 30° | 90° ± 45° | 90° ± 30° | 90° ± 25° | 90° ± 20° | 1) Further measuring ranges available
2) Maximum resolution based on reduced measuring range
3) Diffusive surfaces allow for wider measuring angles | | Sensor electronics | CWL | CWL F | CWL X | | Measuring rate | 2.000 measurements / sec. (2 kHz) | 4.000 measurements / sec. (4 kHz) | 14.000 measurements / sec. ( kHz) | | Light source | LED | Halogen lamp | Xenon high-pressure lamp | | Repeatability | < 0,00009 x Messbereich | | Measuring accuracy | < 0,00033 x Messbereich + 0,001 x Messhöhe | | Calibration tables | 16 | | Operating temperature | + 5° C to + 50° C | | Dimensions (W x H x D) | 200 mm x 100 mm x 93 mm | 260 mm x 115 mm x 310 mm | 360 mm x 160 mm x 400 mm | | | Scope of Delivery | | Measuring head, optical fiber, sensor electronics, operating manual | |
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